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Publications

Journal Articles

  • H. Sinha, H. Ren, M.T. Nichols, J.L. Lauer, M. Tomoyasu, N.M. Russell, G. Giang, G.A. Antonelli, Y. Nishi and J.L. Shohet, "The effects of vacuum-ultraviolet radiation on low-k dielectric films", (Focused Review) Applied Physics Reviews - Journal of Applied Physics 112 11101 (2012) [PDF]
  • H. Sinha, J.L. Lauer, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Charging response of back-end-of-the-line barrier dielectrics to vacuum-ultraviolet radiation", Thin Solid Films 520 5300 (2012) [PDF]
  • H Sinha and J.L. Shohet, "Equivalent-Circuit model for vacuum ultraviolet irradiation of dielectric films" Journal of Vacuum Science and Technology A, 30 031505 (2012) [PDF]
  • M.T. Nichols, H. Sinha, C.A. Wiltbank, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Time-Dependent dielectric breakdown of plasma-exposed porous organosilicate glass," Applied Physics Letters 100 112005 (2012) [PDF]
  • J.L. Lauer, G.S. Upadhyaya, H. Sinha, J.B. Kruger, Y. Nishi and J.L. Shohet, "Plasma and vacuum-ultraviolet-induced charging of SiO2 and HfO2 patterned structures," Journal of Vacuum Science and Technology A, 30 01A109 (2012) [PDF]
  • H. Ren, G. Jiang, G.A. Antonelli, Y. Nishi and J.L. Shohet, "The nature of the defects generated from plasma exposure in pristine and ultraviolet-cured low-k organosilicate glass," Applied Physics Letters 98 252902 (2011) [PDF]
  • H. Sinha, A. Sehgal, H. Ren, M.T. Nichols, M. Tomoyasu, N.M. Russell, Y. Nishi and J.L. Shohet, "Effect of the dielectric substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics," Thin Solid Films, 519 5464 (2011) [PDF]
  • H. Sinha, G.A. Antonelli, G. Jiang, Y. Nishi and J.L. Shohet, "The effects of vacuum ultraviolet radiation on pristine and ultraviolet cured low-k porous organosilicate glass", Journal of Vacuum Science and Technology A 29 030602 (2011) [PDF]
  • H. Ren, M. T. Nichols, G. Jiang, G. A. Antonelli, Y. Nishi, and J.L. Shohet, "Defects in low-k organosilicate glass and their response to processing as measured with electron-spin resonance", Applied Physics Letters 98 102903 (2011) [PDF]
  • H. Ren, Y. Nishi and J.L. Shohet, "Changes to Charge and Defects in Dielectrics from Ion and Photon Fluences during Plasma Exposure," Electrochemical and Solid State Letters 14 H107-H109 (2011) [PDF]
  • H. Sinha, M.T. Nichols, A. Sehgal, M. Tomoyasu, N.M. Russell, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Effect of vacuum ultraviolet and ultraviolet radiation on mobile charges in the bandgap of low-k porous organosilicate dielectrics," Journal of Vacuum Science and Technology A 29 010601 (2011) [PDF]
  • H. Ren, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Plasma damage effects on low-k porous organosilicate glass", Journal of Applied Physics, 108, 094110 (2010) [PDF]
  • H. Sinha, D.B. Straight, J.L. Lauer, N.C. Fuller, S.U. Engelmann, Y. Zhang, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation," Journal of Vacuum Science and Technology A 28 1316-1318 (2010) [PDF]
  • H. Ren, H. Sinha, A. Sehgal, M.T. Nichols, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Surface potential due to charge accumulation during vacuum-ultraviolet exposure for high-k and low-k dielectrics," Applied Physics Letters 97 072901 (2010) [PDF]
  • J.L. Lauer, H. Sinha, M.T. Nichols, G. A. Antonelli, Y.Nishi and J.L. Shohet, "Charge Trapping within UV and VUV Irradiated low-k porous organosilicate dielectrics," Journal of the Electrochemical Society 157 G177-G182 (2010) [PDF]
  • H. Ren, S.L. Cheng, Y. Nishi and J.L. Shohet, "Effects of vacuum ultraviolet and ultraviolet radiation on ultrathin hafnium-oxide dielectric layers on (100)Si as measured with electron spin resonance," Applied Physics Letters 96 192904 (2010) [PDF]
  • H. Sinha, H. Ren, A. Sehgal, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Numerical simulation of vacuum-ultraviolet irradiation of dielectric layers," Applied Physics Letters 96 142903 (2010) [PDF]
  • H. Sinha, J.L. Lauer, M.T. Nichols, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Effect of VUV and UV Irradiation on C-V characteristics of low-k-porous SiCOH dielectrics," Applied Physics Letters 96 052901 (2010) [PDF]
  • G.G. Pinter and J.L. Shohet, "An Inner Medullary Concentrating Process Actuated by Renal Pelvin/Calyceal Muscle Contractions: Assessment and Hypothesis", Nephron Physiology 113 1-6 (2009) [PDF]
  • J.L. Lauer, J.L. Shohet and Y.Nishi, "Effect of Thermal Annealing on Charge Exchange between Oxygen-Interstitial Defects within HfO2 and Oxygen-deficient Silicon Centers within the SiO2/Si Interface", Applied Physics Letters 94, 162907 (2009) [PDF]
  • G. S. Upadhyaya, J.B. Kruger and J.L. Shohet, "Vacuum-ultraviolet-induced charge depletion in plasma-charged patterned-dieletric wafers", Journal of Applied Physics 105, 053308 (2009) [PDF]
  • E. Hanley, J.L. Lauer, B.K. Micales, G.E. Lyons and J.L. Shohet, "Surface-Directed Differentiation of Embryonic Stem Cells", Applied Physics Letters 92 193902 (2008) [PDF]
  • R. Murugesan, E. Hanley, R.M. Albrecht, J.A. Oliver, J.A. Heintz, J.L. Lauer and J.L. Shohet, "The effects of plasma-processing conditions on the morphology of adherent human blood platelets," Journal of Applied Physics 103 093302 (2008) [PDF]
  • G.S. Upadhyaya, J.L. Shohet and J.B. Kruger, "Direct Measurement of Topography-Dependent Charging of Patterned Oxide/Semiconductor Structures”, Applied Physics Letters 91 182108 (2007) [PDF]
  • J.L. Shohet, "The sine-Gordon equation in toroidal magnetic fusion experiments," European Physical Journal 147 191-207 (2007) [PDF]
  • J.D. Chatterton and J.L. Shohet, "Guided Modes and Loss in a Plasma-Filled Bragg Waveguide," Journal of Applied Physics 102 063304 (2007) [PDF]
  • G.S.Upadhyaya and J.L. Shohet, "Comparison of the vacuum-ultraviolet radiation response of HfO2/SiO2/Si dielectric stacks with SiO2/Si," Applied Physics Letters, 90 072904 (2007) [PDF]
  • J.D. Chatterton, G.S. Upadhyaya, J.L. Shohet, J.L. Lauer, R.D. Bathke and K.Kukkady, "Coupling of a vacuum-ultraviolet-radiation source to a processing system", Journal of Applied Physics 100 043306 (2006) [PDF]
  • F-K Tsai, J.L. Lauer and J.L. Shohet, "Aggregation of Blood Components on a Surface in a Microfluidic Environment", Journal of Applied Physics 99 024701 (2006) [PDF]
  • G.G. Pinter and J.L. Shohet, "Two-Fluid Compartments in the Renal Inner Medulla: A View through the Keyhole of the Concentrating Process", Philosophical Transactions of the Royal Society, Series A, 364 1551-1561 (2006) [PDF]
  • J.L. Lauer, J.L. Shohet, R. M. Albrecht, S. Esnault, J. S. Malter, U.H. von Andrian, and S. B. Shohet, “Control of Uniformity of Plasma-Surface Modification Inside of Small-Diameter Polyethylene Tubing using Microplasma Diagnostics”, IEEE Transactions on Plasma Science, 33 791-798 (2005) [PDF]
  • G.S. Upadhyaya, J.L. Shohet and J.L. Lauer, "Monte Carlo simulation of the effects of vacuum-ultraviolet radiation on dielectric materials", Applied Physics Letters 86 102101 (2005) [PDF]
  • J. L. Lauer and J.L. Shohet, “Surface Potential Measurements of Vacuum Ultraviolet Irradiated Al2O3, Si3N4, and SiO2”, IEEE Transactions on Plasma Science, 33 248-249 (2005) [PDF]
  • L. L Chu, K. Takahata, P. Selvaganapathy, Y.B. Gianchandani, and J.L. Shohet, "A Micromachined Kelvin Probe with Integrated Actuator for Microfluidic and Solid State Applications," Journal of Microelectromechanical Systems 14 691-698 (2005) [PDF]
  • J.L. Shohet, B.R. Barmish, H.K. Ebraheem and A.C. Scott, "The Sine-Gordon Equation in Reversed-Field Pinch Experiments," The Physics of Plasmas, 11, 3977-3887 (2004) [PDF]
  • J. L. Lauer, J. L. Shohet, R. M. Albrecht, C. Pratoomtong, R. Murugesan, R. D. Bathke, U.H. von Andrian, S. Esnault, J. S. Malter, and S. B. Shohet, “PEO Surfactant Immobilized by Microplasma Surface Modification to the Lumenal Surface of Small-Diameter Polyethylene Tubing to Reduce the Adhesion of Human Blood Platelets”, Journal of Applied Physics, 96 4539-4546 (2004) [PDF]
  • J. L. Lauer, J.L. Shohet and R.W. Hansen, “Measuring Vacuum Ultraviolet Radiation-Induced Damage”, Journal of Vacuum Science and Technology A, 21, 1253-1259 (2003) [PDF]
  • T. G. Snodgrass and J.L. Shohet, “A Statistical Analysis of Copper Bottom Coverage of High-Aspect-Ratio Features using Ionized Physical Vapor Deposition”, IEEE Transactions on Semiconductor Manufacturing, 15 30-38 (2002) [PDF]
  • H.K. Ebraheem, J.L. Shohet and A.C. Scott, "Mode Locking in Reversed-Field Pinch Experiments," Physical Review Letters 88, 235003 (2002) [PDF]
  • J. L. Lauer, J.L. Shohet, C. Cismaru, R.W. Hansen, M.Y. Foo, and T.J. Henn, “Photoemission and Conduction Currents in Vacuum Ultraviolet Irradiated Aluminum Oxide”, Journal of Applied Physics, 91, 1242-1245 (2002) [PDF]
  • P.J. Rankin, Y.M. Shkel, D.J. Klingenberg, and J.L. Shohet, "Probing Aspects of Nonlinear Conduction in Electrorheological Suspensions," Int. J. Mod. Phys. B 15, 965 (2001) [PDF]
  • C. Cismaru, J.L. Shohet, J.L. Lauer, R.W. Hansen and S. Ostapenko, “Depletion of Charge Produced during Plasma Exposure in Aluminum Oxide by Vacuum Ultraviolet Radiation,” Applied Physics Letters, 77 3914 (2000) [PDF]
  • C. Cismaru, J.L. Shohet and J.P. McVittie, "Synchrotron radiation-induced surface-conductivity of SiO2 for modification of plasma charging," Applied Physics Letters, 76 2191 (2000) [PDF]
  • K-W Hsu, F.A. Choudhury, Y.M. Sung, H. Ren, Y. Nishi, A.G. Olson and J.L. Shohet, "Using capillary array wondows to mnimize charged-particle bombardment during plasma processing of dielectrics," Journal of Applied Physics (submitted for publication) [PDF]
  • Invited Conference Papers
  • J.L. Shohet, H. Ren, M.T. Nichols, H. Sinha, W.Lu, K. Mavrakakis, Q. Lin, N.M. Russell, M. Tomoyasu, G.A. Antonelli, S.U. Engelmann, N.C. Fuller, V. Ryan and Y. Nishi, "The effects of plasma exposure on low-k dielectric materials," to be presented at the SPIE conference on Advanced Etch Technology for Nanopatterning, San Jose (2012)
  • J.L. Shohet, H. Sinha, H. Ren, M.T. Nichols, Y. Nishi, M.Tomoyasu and N.M. Russell, "Damage to low-k porous organosilicate glass from vacuum-ultraviolet radiation", presented at the European conference on Damge to VUV, EUV and X-ray Optics (XDam3), Prague, Czech Republic (2011)
  • J.L. Shohet, H. Sinha, H. Ren, M.T. Nichols, Y. Nishi, M. Tomoyasu and N.M. Russell, "The effects of vacuum ultraviolet and ultraviolet radiation on low-k dielectric materials", presented at the Fourth Plasma Etch and Strip in Microelectronics Workshop, Mechelen, Belgium (2011)
  • J.L. Shohet, “The sine-Gordon equation in Magnetic Fusion Experiments”, presented at the FPU+50 Conference: Nonlinear Waves 50 years after Fermi-Pasta-Ulam, Rouen, France (2005)
  • J.L. Shohet, “The damped-driven sine-Gordon equation models "slinky modes" in toroidal magnetic-fusion experiments,” presented at the 25th Annual International Conference, Center for Nonlinear Studies, Los Alamos National Laboratory, Santa Fe (2005)
  • G.G. Pinter and J.L. Shohet, “Computer Modeling of the Urine Concentrating Mechanism: A Historical Perspective”, presented at the International Workshop on Biocomputation and Modelling in Physiology, Oxford, U.K. (2004)

    • Contributed Conference Papers

  • J. L. Shohet, F. Denes, S. Esnault, S. Manolache, T. J. Henn, Y. Gianchandani, U. von Andrian, S. B. Shohet.,"Cell Adhesion to Plasma-Treated Surfaces,"Proceedings of the 43rd Annual Meeting, American Society of Hematology, (2001) abstract published in Blood (Nov, 2001)
  • J. L. Shohet, T. J. Henn, Y. Gianchandani, F. Denes, J. M. Gauget, U. von Andrian, S. B. Shohet,"Plasma Discharge in "Artificial Blood Vessels", Proceedings of the 43rd Annual Meeting, American Society of Hematology, (2001) abstract published in Blood (Nov, 2001)
  • J.L. Lauer, J.L. Shohet, and R.W. Hansen, ”Response of CHARM-2 Wafers and Surface Potential Measurements to VUV”, presented at 2002 Gaseous Electronics Conference
  • J.L. Lauer, J.L. Shohet and R.W. Hansen, “Measuring Vacuum Ultraviolet Radiation-Induced Damage”, presented at the 2002 Symposium, American Vacuum Society.
  • J.L. Shohet, R.M. Albrecht, S. Esnault, J.L. Lauer, C. Pratoomtong, J.S. Malter, F.S. Denes, U. von Andrian and S.B. Shohet, “Cell Adhesion to the Lumenal Surfaces of Small Diameter Plasma-Treated Polyethylene Tubing”, Proc. Of 44th Annual Meeting, American Society of Hematology (2002)
  • L.L. Chu, K. Takahata, P. Selvaganapathy, Y. B. Gianchandani and J.L. Shohet, “A micromachined Kelvin for surface potential measurements of microfluidic channels and other applications” , presented at Transducers 2003.
  • J.L. Lauer, J.L. Shohet, C. Pratoomtong, J.S. Malter, F.S. Denes, U. von Andrian and S.B. Shohet, “Improved hematocompatibility of the inner surface of capillary PE tubing by microplasma surface modification”, presented at the 56th Annual Gaseous Electronics Conference, San Francisco, (2003).
  • J.L.Lauer, J.L. Shohet, C. Pratoomtong, R.D. Bathke, R.M. Albrecht, S. Esnault, J.S. Malter, S.B. Shohet, and U. von Andrian, “Microplasma Surface Modification of the Inner Surface of Small Diameter Polyethylene Tubing for Improved Hematocompatibility”, presented at the 50th annual symposium, American Vacuum Society, Baltimore (2003).
  • J. L. Lauer, J. L. Shohet, R. M. Albrecht, C. Pratoomtong, R. Murugesan, R. D. Bathke, S. Esnault, J. S. Malter, S. B. Shohet, and U.H. von Andrian, “Control of Uniformity of Plasma-Surface Modification Inside of Small-Diameter Polyethylene Tubing using Microplasma Diagnostics”, IEEE International Conference on Plasma Science, Baltimore (2004)
  • J. L. Lauer, J.L. Shohet, R.W. Hansen, R. D. Bathke, B. Grierson, G. Upadhyaya, K. Kukkady and J. Kalwitz, “Energy Dependence of Vacuum-Ultraviolet-Induced Radiation Damage to Electronic Materials”, International Symposium on Plasma and Process Induced Damage, Austin (2004)
  • G.S. Upadhyaya, J.L. Shohet and J.L. Lauer, “Monte-Carlo Simulation of the Effect of Vacuum Ultraviolet Radiation on Electronics Materials”, International Symposium on Plasma and Process Induced Damage, Austin (2004)