"UW home"department

Publications

Journal Articles

  • F. A. Choudhury, H. M. Nguyen, G. Sabat, B. Minkoff, Y. Nishi, M. R. Sussman, and J. L. Shohet, “Transmission of oxygen radicals through free-standing single-layer and multilayer silicon-nitride and silicon-dioxide films,” Journal of Applied Physics, (to be published) [PDF]
  • H. Miyazoe, S.U. Engelmann, M.A. Guillorn, D. Pei, W. Li, J.L. Lauer, D.B. Straight, J.L. Shohet, and N.C.M. Fuller, "Effects of ultraviolet/vacuum ultraviolet synchrotron radiation one fine-pitch poly-silicon etching, Journal of Vacuum Science and Technology A 35 05C306 (2017) [PDF]
  • X. Guo, D. Pei, H. Zheng, W. Li, S. W. King, Y-H Lin, H-S Fung, C-C Chen, Y. Nishi and J. L. Shohet, Extrinsic Time-Dependent Dielectric Breakdown of low-k Organosilicate Thin Films from Vacuum-Ultraviolet Irradiation, J. Vacuum Science and Technology A 35 021509 (2017) [PDF]
  • D. Pei, P. Xue, W. Li, X. Guo, Y.H. Lin, H.S. Fung, C. C. Chen, Y. Nishi, and J. L. Shohet, The effect of vacuum-ultraviolet irradiation on time-dependent dielectric breakdown of organosilicate dielectrics, Applied Physics Letters, 109 122905 (2016) [PDF]
  • F.A. Choudhury, H. M. Nguyen, M. R. Baklanov , J. F, de-Marneffe, W. Li, D. Pei, S.W. King, Y-H Lin, H-S Fung, C-C Chen, Y. Nishi, and J.L. Shohet, “Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation,” Applied Physics Letters 109 122902 (2016) [PDF]
  • P. Xue, D. Pei, H. Zheng, W. Li, V.V. Afanas’ev, M.K. Baklanov, J-F de Marneffe, Y-H Lin, H-S Fung, C-C Chen Y. Nishi, and J.L. Shohet, “The effects of vacuum-ultraviolet radiation on defects in low-k organosilicate glass (SiCOH) as measured with electron-spin resonance," Thin Solid Films 616 23 (2016)[PDF]
  • F.A. Choudhury, E.T. Ryan, M.H. Nguyen, and J.L. Shohet, “Effects of ultraviolet (UV) irradiation in air and under vacuum on low-k dielectrics,” AIP Advances 6, 075012 (2016) [PDF]
  • H. Zheng, X. Guo, D. Pei, W. Li, J. Blatz, K. Hsu, D. Benjamin, Y-H Lin, H-S Fung, C-C Chen, Y. Nishi and J. L. Shohet, “Nonthermal combined ultraviolet and vacuum-ultraviolet curing process for organosilicate dielectrics,” Applied Physics Letters 108 242906 (2016) [PDF]
  • W. Li, D. Pei, X. Guo, M.K. Cheng, S. Lee, Q. Lin, S.W. King, and J.L. Shohet, "Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films ," Applied Physics Letters 108, 202901 (2016) [PDF]
  • X.Guo, D. Pei, H. Zheng, S. W. King, Y-H Lin, H-S Fung, C-C Chen, Y. Nishi and J. L. Shohet, "Measurements of the Schottky barrier at the low-k SiOC:H/Cu interface using vacuum ultraviolet photoemission spectroscopy," Applied Physics Letters, 107 232905 (2015) [PDF]
  • F.A. Choudhury, G. Sabat, M.R. Sussman, Y. Nishi and J.L. Shohet, "Detection of free radicals emitted from plasmas," Jouurnal of Vacuum Science and Technology A 33 061305 (2015) [PDF]
  • X. Guo, H. Zheng, S. W. King, V. V. Afanas’ev, M. R. Baklanov, J-F de Marneffe, Y. Nishi and J. L. Shohet, “Defect-induced band gap narrowing in low-k dielectrics”, Applied Physics Letters 107 082903 (2015) [PDF]
  • H. Zheng, X. Guo, D. Pei, E.T. Ryan, Y. Nishi and J.L. Shohet, "Effects of vacuum ultraviolet radiation on trapped charges and leakage currents of low-k organosilicate dielectrics," Applied Physics Letters 106 192905 (2015) [PDF]
  • X. Guo, S. W. King, H. Zheng, P. Xue, Y. Nishi and J. L. Shohet, “Effects of vacuum-ultraviolet irradiation on copper penetration into low-k dielectrics under bias-temperature stress,” Applied Physics Letters 106 012904 (2015) [PDF]
  • H. Zheng, E.T.Ryan, Y. Nishi and J.L. Shohet, “Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics,” Applied Physics Letters 105, 202902 (2014) [PDF]
  • X. Guo, J. E. Jakes, S. Banna, Y. Nishi and J. L. Shohet, “Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass,” Journal of Applied Physics 116 044103 (2014) [PDF]
  • D. Pei, M.T. Nichols, S.W. King, J.S. Clarke, Y. Nishi and J.L. Shohet, “Time-Dependent Dielectric Breakdown Measurements of Porous Organosilicate Glass using Mercury and Solid Metal Probes,” Journal of Vacuum Science and Technology A 32 051509 (2014) [PDF]
  • X. Guo, J. E. Jakes, M. T. Nichols, S. Banna, Y. Nishi and J. L. Shohet, “The effect of water uptake on the fracture behavior of low-k organosilicate glass using nanoindentation,” Journal of Vacuum Sciencer and Technology A 32 031512 (2014) [PDF]
  • J.L. Shohet, Q. Lin, S.W. King, H. Ren, S. Banna, J.E. Jakes, R.J. Agasie, M. Naik, Y. Nishi, M.T. Nichols, J. Blatz, K. Hsu, X. Guo, D. Pei, W. Li, S.H. Kim, F. Choudhury, P. Xue, and H. Zheng, “Dielectric Damage,” Electrochemical Society Transactions 60 733 (2014) [PDF]
  • M.T. Nichols, W. Li, D. Pei, G.A. Antonelli, Q. Lin, S. Banna, Y. Nishi and J.L. Shohet, "Measurement of Bandgap Energies in low-k organosilicates,” Journal of Applied Physics 115, 094105 (2014) [PDF]
  • D. Pei, Y. Shkel, D.J. Klingenberg, Z. Segal, Y. Nishi and J.L. Shohet, "Measuring the volume charge in dielectric films using single frequency electro-acoustic waves," Journal of Materials Research, 29 501 (2014) [PDF]
  • H. Zheng, S.W. King, V. Ryan, Y. Nishi and J.L. Shohet, "Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation," Applied Physics Letters 104, 062904 (2014) [PDF]
  • K-W Hsu, H. Ren, R.J. Agasie, S. Bian, Y. Nishi, and J.L. Shohet, "Effects of neutron irradiation of ultra-thin HfO2 film," Applied Physics Letters 104 032910 (2014) [PDF]
  • M. T. Nichols, K. Mavrakakis, Qinguang Lin, and J. L. Shohet, "The Effects of Plasma Exposure and Vacuum Ultraviolet Irradiation on Photopatternable Low-k Dielectric Materials", Journal of Applied Physics, 114 104107 (2013) [PDF]
  • X. Guo, J. E. Jakes, M. T. Nichols, S. Banna, Y. Nishi and J. L. Shohet, “The effect of water uptake on the mechanical properties of low-k organosilicate glass”, Journal of Applied Physics, 114 084103 (2013) [PDF]
  • H. Zheng, M.T. Nichols, D. Pei, Y. Nishi and J.L. Shohet, "Surface Photoconductivity of organosilicate glass dielectrics induced by vacuum-ultraviolet radiation," Journal of Applied Physics, 114 064104 (2013) [PDF]
  • H. Sinha, H. Ren, M. T. Nichols, J.L. Lauer, M. Tomoyasu, N. M. Russell, G. Jiang, G. A. Antonelli, N.C. Fuller, S.U. Engelmann, Q.Lin, V. Ryan, Y. Nishi, and J. L. Shohet, "The effects of vacuum-ultraviolet radiation on low-k dielectric films", (Focused Review) Applied Physics Reviews - Journal of Applied Physics 112 11101 (2012) [PDF]
  • H. Sinha, J.L. Lauer, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Charging response of back-end-of-the-line barrier dielectrics to vacuum-ultraviolet radiation", Thin Solid Films 520 5300 (2012) [PDF]
  • H Sinha and J.L. Shohet, "Equivalent-Circuit model for vacuum ultraviolet irradiation of dielectric films" Journal of Vacuum Science and Technology A, 30 031505 (2012) [PDF]
  • M.T. Nichols, H. Sinha, C.A. Wiltbank, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Time-Dependent dielectric breakdown of plasma-exposed porous organosilicate glass," Applied Physics Letters 100 112005 (2012) [PDF]
  • J.L. Lauer, G.S. Upadhyaya, H. Sinha, J.B. Kruger, Y. Nishi and J.L. Shohet, "Plasma and vacuum-ultraviolet-induced charging of SiO2 and HfO2 patterned structures," Journal of Vacuum Science and Technology A, 30 01A109 (2012) [PDF]
  • H. Ren, G. Jiang, G.A. Antonelli, Y. Nishi and J.L. Shohet, "The nature of the defects generated from plasma exposure in pristine and ultraviolet-cured low-k organosilicate glass," Applied Physics Letters 98 252902 (2011) [PDF]
  • H. Sinha, A. Sehgal, H. Ren, M.T. Nichols, M. Tomoyasu, N.M. Russell, Y. Nishi and J.L. Shohet, "Effect of the dielectric substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics," Thin Solid Films, 519 5464 (2011) [PDF]
  • H. Sinha, G.A. Antonelli, G. Jiang, Y. Nishi and J.L. Shohet, "The effects of vacuum ultraviolet radiation on pristine and ultraviolet cured low-k porous organosilicate glass", Journal of Vacuum Science and Technology A 29 030602 (2011) [PDF]
  • H. Ren, M. T. Nichols, G. Jiang, G. A. Antonelli, Y. Nishi, and J.L. Shohet, "Defects in low-k organosilicate glass and their response to processing as measured with electron-spin resonance", Applied Physics Letters 98 102903 (2011) [PDF]
  • H. Ren, Y. Nishi and J.L. Shohet, "Changes to Charge and Defects in Dielectrics from Ion and Photon Fluences during Plasma Exposure," Electrochemical and Solid State Letters 14 H107-H109 (2011) [PDF]
  • H. Sinha, M.T. Nichols, A. Sehgal, M. Tomoyasu, N.M. Russell, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Effect of vacuum ultraviolet and ultraviolet radiation on mobile charges in the bandgap of low-k porous organosilicate dielectrics," Journal of Vacuum Science and Technology A 29 010601 (2011) [PDF]
  • H. Ren, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Plasma damage effects on low-k porous organosilicate glass", Journal of Applied Physics, 108, 094110 (2010) [PDF]
  • H. Sinha, D.B. Straight, J.L. Lauer, N.C. Fuller, S.U. Engelmann, Y. Zhang, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation," Journal of Vacuum Science and Technology A 28 1316-1318 (2010) [PDF]
  • H. Ren, H. Sinha, A. Sehgal, M.T. Nichols, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Surface potential due to charge accumulation during vacuum-ultraviolet exposure for high-k and low-k dielectrics," Applied Physics Letters 97 072901 (2010) [PDF]
  • J.L. Lauer, H. Sinha, M.T. Nichols, G. A. Antonelli, Y.Nishi and J.L. Shohet, "Charge Trapping within UV and VUV Irradiated low-k porous organosilicate dielectrics," Journal of the Electrochemical Society 157 G177-G182 (2010) [PDF]
  • H. Ren, S.L. Cheng, Y. Nishi and J.L. Shohet, "Effects of vacuum ultraviolet and ultraviolet radiation on ultrathin hafnium-oxide dielectric layers on (100)Si as measured with electron spin resonance," Applied Physics Letters 96 192904 (2010) [PDF]
  • H. Sinha, H. Ren, A. Sehgal, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Numerical simulation of vacuum-ultraviolet irradiation of dielectric layers," Applied Physics Letters 96 142903 (2010) [PDF]
  • H. Sinha, J.L. Lauer, M.T. Nichols, G.A. Antonelli, Y. Nishi and J.L. Shohet, "Effect of VUV and UV Irradiation on C-V characteristics of low-k-porous SiCOH dielectrics," Applied Physics Letters 96 052901 (2010) [PDF]
  • G.G. Pinter and J.L. Shohet, "An Inner Medullary Concentrating Process Actuated by Renal Pelvin/Calyceal Muscle Contractions: Assessment and Hypothesis", Nephron Physiology 113 1-6 (2009) [PDF]
  • J.L. Lauer, J.L. Shohet and Y.Nishi, "Effect of Thermal Annealing on Charge Exchange between Oxygen-Interstitial Defects within HfO2 and Oxygen-deficient Silicon Centers within the SiO2/Si Interface", Applied Physics Letters 94, 162907 (2009) [PDF]
  • G. S. Upadhyaya, J.B. Kruger and J.L. Shohet, "Vacuum-ultraviolet-induced charge depletion in plasma-charged patterned-dieletric wafers", Journal of Applied Physics 105, 053308 (2009) [PDF]
  • E. Hanley, J.L. Lauer, B.K. Micales, G.E. Lyons and J.L. Shohet, "Surface-Directed Differentiation of Embryonic Stem Cells", Applied Physics Letters 92 193902 (2008) [PDF]
  • R. Murugesan, E. Hanley, R.M. Albrecht, J.A. Oliver, J.A. Heintz, J.L. Lauer and J.L. Shohet, "The effects of plasma-processing conditions on the morphology of adherent human blood platelets," Journal of Applied Physics 103 093302 (2008) [PDF]
  • G.S. Upadhyaya, J.L. Shohet and J.B. Kruger, "Direct Measurement of Topography-Dependent Charging of Patterned Oxide/Semiconductor Structures”, Applied Physics Letters 91 182108 (2007) [PDF]
  • J.L. Shohet, "The sine-Gordon equation in toroidal magnetic fusion experiments," European Physical Journal 147 191-207 (2007) [PDF]
  • J.D. Chatterton and J.L. Shohet, "Guided Modes and Loss in a Plasma-Filled Bragg Waveguide," Journal of Applied Physics 102 063304 (2007) [PDF]
  • G.S.Upadhyaya and J.L. Shohet, "Comparison of the vacuum-ultraviolet radiation response of HfO2/SiO2/Si dielectric stacks with SiO2/Si," Applied Physics Letters, 90 072904 (2007) [PDF]
  • J.D. Chatterton, G.S. Upadhyaya, J.L. Shohet, J.L. Lauer, R.D. Bathke and K.Kukkady, "Coupling of a vacuum-ultraviolet-radiation source to a processing system", Journal of Applied Physics 100 043306 (2006) [PDF]
  • F-K Tsai, J.L. Lauer and J.L. Shohet, "Aggregation of Blood Components on a Surface in a Microfluidic Environment", Journal of Applied Physics 99 024701 (2006) [PDF]
  • G.G. Pinter and J.L. Shohet, "Two-Fluid Compartments in the Renal Inner Medulla: A View through the Keyhole of the Concentrating Process", Philosophical Transactions of the Royal Society, Series A, 364 1551-1561 (2006) [PDF]
  • J.L. Lauer, J.L. Shohet, R. M. Albrecht, S. Esnault, J. S. Malter, U.H. von Andrian, and S. B. Shohet, “Control of Uniformity of Plasma-Surface Modification Inside of Small-Diameter Polyethylene Tubing using Microplasma Diagnostics”, IEEE Transactions on Plasma Science, 33 791-798 (2005) [PDF]
  • G.S. Upadhyaya, J.L. Shohet and J.L. Lauer, "Monte Carlo simulation of the effects of vacuum-ultraviolet radiation on dielectric materials", Applied Physics Letters 86 102101 (2005) [PDF]
  • J. L. Lauer and J.L. Shohet, “Surface Potential Measurements of Vacuum Ultraviolet Irradiated Al2O3, Si3N4, and SiO2”, IEEE Transactions on Plasma Science, 33 248-249 (2005) [PDF]
  • L. L Chu, K. Takahata, P. Selvaganapathy, Y.B. Gianchandani, and J.L. Shohet, "A Micromachined Kelvin Probe with Integrated Actuator for Microfluidic and Solid State Applications," Journal of Microelectromechanical Systems 14 691-698 (2005) [PDF]
  • J.L. Shohet, B.R. Barmish, H.K. Ebraheem and A.C. Scott, "The Sine-Gordon Equation in Reversed-Field Pinch Experiments," The Physics of Plasmas, 11, 3977-3887 (2004) [PDF]
  • J. L. Lauer, J. L. Shohet, R. M. Albrecht, C. Pratoomtong, R. Murugesan, R. D. Bathke, U.H. von Andrian, S. Esnault, J. S. Malter, and S. B. Shohet, “PEO Surfactant Immobilized by Microplasma Surface Modification to the Lumenal Surface of Small-Diameter Polyethylene Tubing to Reduce the Adhesion of Human Blood Platelets”, Journal of Applied Physics, 96 4539-4546 (2004) [PDF]
  • J. L. Lauer, J.L. Shohet and R.W. Hansen, “Measuring Vacuum Ultraviolet Radiation-Induced Damage”, Journal of Vacuum Science and Technology A, 21, 1253-1259 (2003) [PDF]
  • T. G. Snodgrass and J.L. Shohet, “A Statistical Analysis of Copper Bottom Coverage of High-Aspect-Ratio Features using Ionized Physical Vapor Deposition”, IEEE Transactions on Semiconductor Manufacturing, 15 30-38 (2002) [PDF]
  • H.K. Ebraheem, J.L. Shohet and A.C. Scott, "Mode Locking in Reversed-Field Pinch Experiments," Physical Review Letters 88, 235003 (2002) [PDF]
  • J. L. Lauer, J.L. Shohet, C. Cismaru, R.W. Hansen, M.Y. Foo, and T.J. Henn, “Photoemission and Conduction Currents in Vacuum Ultraviolet Irradiated Aluminum Oxide”, Journal of Applied Physics, 91, 1242-1245 (2002) [PDF]
  • P.J. Rankin, Y.M. Shkel, D.J. Klingenberg, and J.L. Shohet, "Probing Aspects of Nonlinear Conduction in Electrorheological Suspensions," Int. J. Mod. Phys. B 15, 965 (2001) [PDF]
  • C. Cismaru, J.L. Shohet, J.L. Lauer, R.W. Hansen and S. Ostapenko, “Depletion of Charge Produced during Plasma Exposure in Aluminum Oxide by Vacuum Ultraviolet Radiation,” Applied Physics Letters, 77 3914 (2000) [PDF]
  • C. Cismaru, J.L. Shohet and J.P. McVittie, "Synchrotron radiation-induced surface-conductivity of SiO2 for modification of plasma charging," Applied Physics Letters, 76 2191 (2000) [PDF]
  • K-W Hsu, T-H Chang, L. Zhao, R.J. Agasie, T. B. Betthauser, R.J. Nickles, Y. Nishi, Z. Ma, and J.L. Shohet, "Radiation-Induced Effects on HfOx-Based Resistive Random Access Memory," Journal of Applied Physics (submitted for publication) [PDF]
  • W. Li, D. Pei, D. Benjamin, J. Chang, S. W. King, Q. Lin, and J. L. Shohet, “The effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low-k dielectrics,” Journal of Vacuum Science and Technology A (submitted for publication) [PDF]
  • Invited Conference Papers
  • J.L. Shohet, Q. Lin, S.W. King, H. Ren, S. Banna, J.E. Jakes, R.J. Agasie, M. Naik, Y. Nishi, M.T. Nichols, J. Blatz, K. Hsu, X. Guo, D. Pei, W. Li, S.H. Kim, F. Choudhury, P. Xue, and H. Zheng, “Dielectric damage” presented at the China Semiconductor Technology International Conference, Shanghai, China (2014)
  • J.L. Shohet, H. Ren, M.T. Nichols, H. Sinha, W.Lu, K. Mavrakakis, Q. Lin, N.M. Russell, M. Tomoyasu, G.A. Antonelli, S.U. Engelmann, N.C. Fuller, V. Ryan and Y. Nishi, "The effects of plasma exposure on low-k dielectric materials," presented at the SPIE conference on Advanced Etch Technology for Nanopatterning, San Jose (2012)
  • J.L. Shohet, H. Sinha, H. Ren, M.T. Nichols, Y. Nishi, M.Tomoyasu and N.M. Russell, "Damage to low-k porous organosilicate glass from vacuum-ultraviolet radiation", presented at the European conference on Damge to VUV, EUV and X-ray Optics (XDam3), Prague, Czech Republic (2011)
  • J.L. Shohet, H. Sinha, H. Ren, M.T. Nichols, Y. Nishi, M. Tomoyasu and N.M. Russell, "The effects of vacuum ultraviolet and ultraviolet radiation on low-k dielectric materials", presented at the Fourth Plasma Etch and Strip in Microelectronics Workshop, Mechelen, Belgium (2011)
  • J.L. Shohet, “The sine-Gordon equation in Magnetic Fusion Experiments”, presented at the FPU+50 Conference: Nonlinear Waves 50 years after Fermi-Pasta-Ulam, Rouen, France (2005)
  • J.L. Shohet, “The damped-driven sine-Gordon equation models "slinky modes" in toroidal magnetic-fusion experiments,” presented at the 25th Annual International Conference, Center for Nonlinear Studies, Los Alamos National Laboratory, Santa Fe (2005)
  • G.G. Pinter and J.L. Shohet, “Computer Modeling of the Urine Concentrating Mechanism: A Historical Perspective”, presented at the International Workshop on Biocomputation and Modelling in Physiology, Oxford, U.K. (2004)
  • Contributed Conference Papers

  • J. L. Shohet, F. Denes, S. Esnault, S. Manolache, T. J. Henn, Y. Gianchandani, U. von Andrian, S. B. Shohet.,"Cell Adhesion to Plasma-Treated Surfaces,"Proceedings of the 43rd Annual Meeting, American Society of Hematology, (2001) abstract published in Blood (Nov, 2001)
  • J. L. Shohet, T. J. Henn, Y. Gianchandani, F. Denes, J. M. Gauget, U. von Andrian, S. B. Shohet,"Plasma Discharge in "Artificial Blood Vessels", Proceedings of the 43rd Annual Meeting, American Society of Hematology, (2001) abstract published in Blood (Nov, 2001)
  • J.L. Lauer, J.L. Shohet, and R.W. Hansen, ”Response of CHARM-2 Wafers and Surface Potential Measurements to VUV”, presented at 2002 Gaseous Electronics Conference
  • J.L. Lauer, J.L. Shohet and R.W. Hansen, “Measuring Vacuum Ultraviolet Radiation-Induced Damage”, presented at the 2002 Symposium, American Vacuum Society.
  • J.L. Shohet, R.M. Albrecht, S. Esnault, J.L. Lauer, C. Pratoomtong, J.S. Malter, F.S. Denes, U. von Andrian and S.B. Shohet, “Cell Adhesion to the Lumenal Surfaces of Small Diameter Plasma-Treated Polyethylene Tubing”, Proc. Of 44th Annual Meeting, American Society of Hematology (2002)
  • L.L. Chu, K. Takahata, P. Selvaganapathy, Y. B. Gianchandani and J.L. Shohet, “A micromachined Kelvin for surface potential measurements of microfluidic channels and other applications” , presented at Transducers 2003.
  • J.L. Lauer, J.L. Shohet, C. Pratoomtong, J.S. Malter, F.S. Denes, U. von Andrian and S.B. Shohet, “Improved hematocompatibility of the inner surface of capillary PE tubing by microplasma surface modification”, presented at the 56th Annual Gaseous Electronics Conference, San Francisco, (2003).
  • J.L.Lauer, J.L. Shohet, C. Pratoomtong, R.D. Bathke, R.M. Albrecht, S. Esnault, J.S. Malter, S.B. Shohet, and U. von Andrian, “Microplasma Surface Modification of the Inner Surface of Small Diameter Polyethylene Tubing for Improved Hematocompatibility”, presented at the 50th annual symposium, American Vacuum Society, Baltimore (2003).
  • J. L. Lauer, J. L. Shohet, R. M. Albrecht, C. Pratoomtong, R. Murugesan, R. D. Bathke, S. Esnault, J. S. Malter, S. B. Shohet, and U.H. von Andrian, “Control of Uniformity of Plasma-Surface Modification Inside of Small-Diameter Polyethylene Tubing using Microplasma Diagnostics”, IEEE International Conference on Plasma Science, Baltimore (2004)
  • J. L. Lauer, J.L. Shohet, R.W. Hansen, R. D. Bathke, B. Grierson, G. Upadhyaya, K. Kukkady and J. Kalwitz, “Energy Dependence of Vacuum-Ultraviolet-Induced Radiation Damage to Electronic Materials”, International Symposium on Plasma and Process Induced Damage, Austin (2004)
  • G.S. Upadhyaya, J.L. Shohet and J.L. Lauer, “Monte-Carlo Simulation of the Effect of Vacuum Ultraviolet Radiation on Electronics Materials”, International Symposium on Plasma and Process Induced Damage, Austin (2004)