Charge Tomography system is being implemented to determine location and amount of charge in thin dielectric films. Charge tomography uses the Pulsed Electro-Acoustic (PEA) method. The PEA system involves creating a parallel plate capacitor with dielectric under observation sandwiched in between. A voltage pulse is applied across the parallel plates. The pulse causes mechanical vibration of trapped charges in the dielectric. A sensor can detect the mechanical vibrations and the analysis of the signal can determine the location and amount of trapped charges.