High-k unpatterned Dielectrics

Electron Spin Resonance

We are able to carry out electron spin resonance measurement on dielectric samples deposited on high resistivity Silicon wafers. This technique can be used to determine certain chemical bonds or defect states in dielectric materials.

Bruker® ELEXSYS E 500 is built and is used as the crucial system for ESR measurement. It is working in X-band and fully equipped for accurate data acquisition and result processing.

ESR measurements focus on detecting the defect states of the high permittivity Hafnium Oxide samples.